| General Characteristics | |
| Measurement | By means of a 20 um-pitch (0.0008 inch)graduated glass. |
| Glass thermal expansion coefficient | 8 ppm/K |
| Accuracy | ±5 um (±0.0002") ±3 um (±0.00012") |
| Maximum speed | 120m/min |
| Maximum vibration | 20g |
| Moving thrust | <5N |
| Operating temperature | 0°...50℃ |
| Storage temperature | `-20°...70℃ |
| Weight | 0.25KG+2.25KG/M |
| Relative humidity | 20...70℃ |
| Protection | IP 53(Standard) IP 64(DIN 40050)using pressurized |